2/18/03

ARO Introduces High Performance 193 nm Optics

Alpine Research Optics (ARO, Boulder, CO) has introduced a series of high performance, 193 nm optics for use in demanding laser applications, such as microlithography, micromachining and LASIK. These CaF2 components include mirrors, partial reflectors and windows for both 0° and 45° operation, as well as a range of spherical and cylindrical lenses. The spherical lenses and windows are available in diameters ranging up to 75 mm, and the spherical lenses are offered with radius of curvature between 0.05 and 10 meters. Cylindrical lenses are available with radius of curvature between 0.05 and 10 meters, and can be produced in lengths of up to 75 mm.

All these optics have been designed and fabricated to deliver long lifetime and exceptional damage threshold when used with high fluence, high repetition rate excimer lasers. This performance is the result of rigorous control of contamination during fabrication, as well as by carefully matching the thermal characteristics between substrate and coating to minimize stress.